Production of periodically arranged fine crystal



PROBLEM TO BE SOLVED: To provide a manufacturing method of fine crystals by which fine crystals are accurately formed at positions where the crystals are two- dimensionally or three-dimensionally periodically arranged. SOLUTION: An amorphous tin film 22 formed on a surface of a substrate 6 is irradiated with coherent radiation beams or laser beams or coherent electron beams from a plurality of directions to form two-dimensional interference images on the amorphous thin film 22. Thereby amorphous materials at positions where the two-dimensional interference images are present are turned into the fine crystals. COPYRIGHT: (C)1999,JPO
(57)【要約】 【課題】 2次元的または3次元的に周期配列した位置 に正確に微結晶を形成する製造方法を提供すること。 【解決手段】 コヒーレントな放射光、レーザー光また はコヒーレントな電子ビームのいずれかを複数の方向か ら基板6表面上に形成された非晶質薄膜22に照射して 非晶質薄膜22上に2次元干渉像を形成することによ り、2次元干渉像の存在する位置の非晶質材料を微結晶 化するようにした周期配列した微結晶の製造方法。




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